Flexible Cleanroom
The Flexible Cleanroom is a ~ 2000 square foot class 100 cleanroom facility used by graduate students and Stanford researchers from a wide range of backgrounds to do nano-fabrication related work, such as photolithography, wet etching, chemical processing, rapid thermal annealing, plasma cleaning, sample preparation, liftoff, chemical etching, thickness measurement, characterization, probing, testing, precision cleaning, optical assembling, delicate assembly work, etc. The lab is flexible in the sense that we work with many odd materials which are generally banned in a rigid CMOS type of facility, and we generally work with smaller chips, crystals, polymers, micro-machined devices, etc. The lab users have a lot of interaction with each other and take an ownership of the facility by volunteering to help with training on certain machines. Lab users pay on a monthly basis for only those months that they use the lab, and that payment is mainly to cover overhead such as cleanroom supplies, gases, chemicals, etc.
Lab Protocol (10-10-2011)Contact Information
Thomas Eugene Carver
(650) 723-1861, (650) 725-2294