AFM micrograph of an oxide feature on silicon.
The line was written using AFM local oxidation of silicon technique.
The AFM was operated in the contact mode with a tip bias of -20 volts.
Oxidation of Single-Crystal Silicon
AFM micrograph of an oxide feature on silicon.
The line was written using AFM local oxidation of silicon technique.
The AFM was operated in the contact mode with a tip bias of -20 volts.
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introduction
to oxidation of silicon