Leland T. Edwards Professor in the School of Engineering and Professor (Research) of Applied Physics
Ginzton Laboratory, Room 12
(650) 723-0213
Email: quate@stanford.edu
Website: http://www.stanford.edu/group/quate_group/Home/HomePages/
Introduction/Introduction2.html

Professional Experience and Honors

• Bell Laboratories, 1949-58.
• Sandia Corporation, 1959-61.
• Stanford University, 1961-present.
• Guggenheim Fellow and Fulbright Scholar, Faculte des Sciences, Montpellier, France, 1968-69.
• Chair, Department of Applied Physics, 1969-72, 1978-81.
• Associate Dean, School of Humanities and Sciences, 1972-74, 1982-83.
• Member, National Academy of Engineering, National Academy of Sciences, Royal Society of London (Foreign Member).
• Fellow, American Physical Society; Institute of Electrical and Electronics Engineers; American Academy of Arts and Sciences; Acoustical Society of America, Royal Microscopical Society (Honorary).
• IEEE Morris N. Liebmann Award; Rank Prize for Opto-electronics, IEEE Medal of Honor; President's National Medal of Science.

Research Interests
The dominant theme of our research over the past decade has been the development and application of Scanning Probes Microscopes. We use MEMS technology and micromachining to fabricate various form of cantilevers with integrated sensors and actuators. These instruments are capable of resolving atomic structure when operating in a vacuum, but primarily they are used in ambient atmosphere to image nanoscale structures. In our current program we are using these instruments to fabricate nanoscale devices. In a parallel theme we are employing these tools to study properties of biological molecules.

Publications

High Throughput, High Resolution Scanning Probe Microscopy
J. D. Adams, S. C. Minne, S. R. Manalis, K. Wilder, G. Yaralioglu, A. Atalar, D. Adderton, and C. F. Quate, "High Throughput, High Resolution Scanning Probe Microscopy," Future Fab International, Issue 6, 259-263 (1998).

Centimeter scale atomic force microscope imaging and lithography
S. C. Minne, J. D. Adams,G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate, "Centimeter scale atomic force microscope imaging and lithography," Appl. Phys. Lett., vol. 73, no. 12, 1742-1744 (1998).

Automated parallel high speed atomic force microscopy
S. C. Minne, G. Yaralioglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar, and C. F. Quate, "Automated parallel high speed atomic force microscopy," Appl. Phys. Lett., vol. 72, no. 18, 2340-2342 (1998).

Two dimensional micromechanical bimorph arrays for detection of thermal radiation
S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, "Two dimensional micromechanical bimorph arrays for detection of thermal radiation," Appl. Phys. Lett., vol. 70, no. 24, 3311-3313 (1997).

Interdigital cantilevers for atomic force microscopy
S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, "Interdigital cantilevers for atomic force microscopy," Appl. Phys. Lett., vol. 69, no. 26, 3944-3946 (1996).

High speed atomic force microscopy using an integrated actuator and optical lever detection
S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, "High speed atomic force microscopy using an integrated actuator and optical lever detection," Rev. Sci. Instrum., vol. 67, no. 9, 3294 (1996).

Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
S. C. Minne, S. R. Manalis, A. Atalar, and C. F. Quate, "Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor," Appl. Phys. Lett, vol. 68, no. 10, 1427-1429 (1996).

Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor
S. R. Manalis, S. C. Minne, and C. F. Quate, "Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor," Appl. Phys. Lett., vol. 68, no. 6, 871-873 (1996).

Atomic force microscopy for cross section inspection and metrology
K. Wilder, C.F. Quate, B. Singh, R. Alvis, and W.H. Arnold, "Atomic force microscopy for cross section inspection and metrology," J. Vac. Sci. Technol. B, vol. 14, no. 6, 4004-4008 (1996).

Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
S. C. Minne, S. R. Manalis, and C. F. Quate, "Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators," Appl. Phys. Lett, vol. 67, no. 26, 3918-3920 (1995).

The local laboratory
C. F. Quate, "The local laboratory," The Forum Section, Int'l. J. of Optoelectronics, Devices and Technologies, vol. 10, 286-290 (June 1995).

The AFM as a tool for surface imaging
C. F. Quate, Invited Paper, "The AFM as a Tool for Surface Imaging," Surface Science: The First Thirty Years, vol. 299-300 (a Special Commemorative Volume of the 30th Birthday of the Journal Surface Science), Ed: Charles B. Duke, 980-995 (Elsevier Science Publishers, Amsterdam, January 1994).

Electron beam and scanning probe lithography: A comparison
K. Wilder, B. Singh, D. F. Kyser, and C. F. Quate, "Electron beam and scanning probe lithography: A comparison," J. Vac. Sci. Technol. B, vol. 16, no. 6 (1998).

Noncontact nanolithography using the atomic force microscope
K. Wilder, D. Adderton, R. Bernstein, V. Elings, and C. F. Quate, "Noncontact nanolithography using the atomic force microscope," Appl. Phys. Lett., vol. 73, no. 17, 2527-2529 (1998).

Centimeter scale atomic force microscope imaging and lithography
S. C. Minne, J. D. Adams,G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate, "Centimeter scale atomic force microscope imaging and lithography," Appl. Phys. Lett., vol. 73, no. 12, 1742-1744 (1998).

Hybrid atomic force / scanning tunneling lithography
K. Wilder, H. T. Soh, A. Atalar, and C. F. Quate, "Hybrid atomic force / scanning tunneling lithography," J. Vac. Sci. Technol. B, vol. 15, no. 5, 1811-1817 (1997).

Scanning probe lithography for electron device fabrication
H. T. Soh, K. Wilder, and C. F. Quate "Scanning probe lithography for electron device fabrication," Proceedings of the 1997 Samsung Humantech Thesis Competition (1997).

Fabrication of 100 nm pMOSFETs with hybrid AFM / STM lithography
H. T. Soh, K. Wilder, A. Atalar, and C. F. Quate, "Fabrication of 100 nm pMOSFETs with hybrid AFM / STM lithography," 1997 Symposium on VLSI Technology, Digest of Technical Papers, 129-130 (1997).

Cantilever arrays for lithography
K. Wilder, H. T. Soh, S. C. Minne, S. R. Manalis, and C. F. Quate, "Cantilever arrays for lithography," Naval Research Reviews, vol. XLIX, no. 1, 35-48 (1997).

Scanning probes as a lithography tool for nanostructures
C. F. Quate, "Scanning Probes as a lithography tool for nanostructures," Surface Science, vol. 386, 259-264 (1997).

Independent parallel lithography using the atomic force microscope
S. C. Minne, S. R. Manalis, A. Atalar, and C. F. Quate, "Independent parallel lithography using the atomic force microscope," J. Vac. Sci. Technol. B, vol. 14, no. 4, 2456-2461 (1997).

Scanning probes as a lithography tool for nanostructures
C. F. Quate, "Scanning probes as a lithography tool for nanostructures," Proceedings of the Tenth Toyota Conference, Mikkabi, Japan (6-8 Nov 1996).

Nanoscale lithography with the AFM
C. F. Quate, "Nanoscale lithography with the AFM," Proc. of the Robert A. Welch Foundation, 40th Conference on Chemistry Research, Chemistry on the Nanoscale, Houston, TX, 87-100 (21-22 Oct 1996).

Improved cantilevers for AFM thermomechanical data storage
B. W. Chui, T. D. Stowe, T. W. Kenny, Y. S. Ju, K. E. Goodson, S. C. Minne, H. T. Soh, C. F. Quate, H. J. Mamin, B. D. Terris, R. P. Ried, and D. Rugar, "Improved cantilevers for AFM thermomechanical data storage," Proceedings of 6th Sensors and Actuators Workshop, Hilton Head, SC, 2-6 June1996, 219-224.

Nanometer scale lithography at high scanning speeds with the atomic force microscope using spin on glass
S.W. Park, H.T. Soh, C.F. Quate, S.I. Park, "Nanometer scale lithography at high scanning speeds with the atomic force microscope using spin on glass," Appl. Phys. Lett. 67 (15), (October 1995)

Synthesis of Individual Single-Walled Carbon Nanotubes on Patterned Silicon Wafers
H.T. Soh, J. Kong, A. M. Cassell, C. F. Quate, H. Dai, "Synthesis of Individual Single-Walled Carbon Nanotubes on Patterned Silicon Wafers," Nature, 395, 878 - 881

Ultra-Low resistance, Through-Wafer Via (TWV) Technology and Its Applications in Three Dimensional Structures on Silicon
H.T. Soh, C.P. Yue, A.M. McCarthy, C. Ryu, T.H. Lee, C.F. Quate, "Ultra-Low resistance, Through-Wafer Via (TWV) Technology and Its Applications in Three Dimensional Structures on Silicon," Extended Abstracts of 1998 International Conference on Solid State Devices and Materials, Hiroshima Japan, Sept 7-10, 1998

Fabrication of High-Density Cantilever Arrays and Through-Wafer Interconnects
E.M. Chow, H.T. Soh, A. Partridge, J.A. Harley, T.W. Kenny, C.F. Quate, S. Abdollahi-Alibeik, J. McVittie, A.McCarthy, "Fabrication of High-Density Cantilever Arrays and Through-Wafer Interconnects," Proceedings of 6th Sensors and Actuators Workshop, Hilton Head, SC, June 1998.

Surface micromachined capacitive ultrasonic transducers
I. Ladabaum, X. C. Jin, H. T. Soh and A. Atalar and B. T. Khuri-Yakub, "Surface micromachined capacitive ultrasonic transducers," IEEE Transactions on Ultrasonics, Ferroelectronics, and Frequency Control, Apr. 1997.

Silicon micromachined ultrasonic immersion transducers
H.T. Soh, I. ladabaum, A. Atalar, C.F. Quate, "Silicon micromachined ultrasonic immersion transducers," Appl. Phys. Lett, 69 (24) 3674-3776 (1996)