Practice and theory of MEMS
device design and fabrication, orientation to fabrication facilities,
and introduction to techniques for design and evaluation of
MEMS devices in the context of designed projects. Emphasis
on MEMS design (need finding, brainstorming, evaluation, and
design methodology), characterization, and fabrication, including
photolithography, etching, oxidation, diffusion, and ion implanation.
Emphasis is on team-based innovative design, prototyping, and
characterization of new devices driven by customer requirements.
Number of Credits
4 Units
Which Quarter(s) in 2004 – 2005
A in Spring & B in Summer.
How many students enrolled
in 2003 – 2004 and from what schools
A) 20 (science, engineering,
medicine) (+5 audit)
B) 19 (science, engineering) (+2 audit UG & med)
Number of graduates
A) 19
B) 19
Number of undergraduates
A) 1
B) 1
# of Bio Teams
A) N/A
B) 3
How are teams formed
Interdisciplinary, analytical
background, projects matched by student interest
What are the major work
deliverables
MEMS device design and fabrication
Prototyping
Homeworks & Quizzes (A)
Final report documents customer
requirements, final design and supporting analysis of the
device and market
Poster and oral presentations
How are project areas
selected
Several faculty affiliated
with the Stanford BioDesign and Bio-X Programs, including Professor
Pruitt, have proposed projects suitable for student teams to
undertake in this 2 academic quarter sequence
Facilities used
Herrin T-175 in Spring
MERL conf room & lab in Summer
MERL labs
SNF
Biodesign Colab
Number of TAs assigned
A) 1 TA ( plus 5 extra part
time TAs)
B) 1 TA
Other comments
6 projects in teams of 3-4
students, internal and industry sponsorship project costs
