Welcome to
the Helms Group Home Page.
We are a research group in the Electrical Engineering Department at
working on Surface Science and Semiconductor Processing under
In our web pages, you can explore:
People
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 Group Meetings and Seminars
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Areas of Research
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WWW Links
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 Papers and Publications
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 Industrial Affiliates
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NSF/SRC Engineering Research Center
Environmentally Benign Semiconductor Manufacturing
This page is under reconstruction. Please send your comments to Stephen Tang.