The style of the report should be similar to a PhD thesis (but not as long). It should include at least the following chapters :
1.A discussion of the process flow used, including the reasons for each step, problems encountered and solutions adopted
2.Simulations (by SUPREM, PISCES, etc.) and calculations of the structures (e.g. thickness, doping profile ..........) and electrical parameters (e.g. sheet resistance, threshold voltage ..........) that should result from the process flow (Similar to the Process and Device Modeling Paper)
3.Methodology and results of measurements taken on test structures, devices and circuits
4.Comparison of (2) and (3) and explanations of all discrepancies
5.Conclusions and comments
One copy of the final report will be due on Monday, 3/16/2009 (The report will be kept for record)
The paper will be graded according to the following guidelines :
Completeness of information 25%
Quality of presentation 20%
Innovations and others 5%