Journal Papers

2007

  2. C. Antoine, X. Li, J.-S. Wang, O. Solgaard, “Reconfigurable Optical Wavelength Multiplexer Using a MEMS Tunable Blazed Grating”, Journal of Lightwave Technology, vol. 25, no. 10, October 2007, pp. 3100-3107.
  3. O. Kilic, M. Digonnet, G. Kino O. Solgaard, “External fibre Fabry–Perot acoustic sensor based on a photonic-crystal mirror”, IOP Publishing Measurement Science and Technology, vol, 18, 12 September 2007, pp. 3049–3054.
  4. H. Ra, W. Piyawattanametha, Y. Taguchi, D. Lee, M.J. Mandella, O. Solgaard, “Two- Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy“, Journal of Microelectromechanical Systems, vol. 16, no. 4, August 2007, pp. 969-976.
  5. O. Sahin, S. Magonov, C. Su, C.F. Quate, O. Solgaard, “An atomic force microscope tip designed to measure time-varying nanomechanical forces”, Nature Nanotechnology 2, pp. 507-514, 29 Jul 2007. Published online: 29 July 2007, doi:10.1038/nnano.2007.226.
  6. H.-J. Shin, M.C. Pierce, D. Lee, H. Ra, O. Solgaard, R. Richards-Kortum, "Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens," OPTICS EXPRESS, Vol. 15, No.15, pp. 9113-9122, 23 July 2007.
  7. I.W. Jung, J.-S. Wang, O. Solgaard, “Optical Pattern Generation Using a Spatial Light Modulator for Maskless Lithography”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 13, no. 2, March/April, 2007, pp. 147-154.
  8. I.W. Jung, Y.-A. Peter, E. Carr, J.-S. Wang, O. Solgaard, Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 13, no. 2, March/April, 2007, pp. 162-167.
  9. K. Yu, N. Park, D. Lee, O. Solgaard, “Superresolution Digital Image Enhancement by Subpixel Image Translation with a Scanning Micromirror”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 13, no. 2, March/April, 2007, pp. 304-311.
  10. J.T.C. Liu, M.J. Mandella, H. Ra, L.K. Wong, O. Solgaard, G.S. Kino, W. Piyawattanametha, C.H.Contag, T.D. Wang, “Miniature near-infrared dual-axes confocal microscope utilizing a twodimensional microelectromechanical systems scanner”, Optics Letters, vol.32, no.3, pp.p256-258, 1 Feb. 2007.

  11. 2006 top

  12. M. Lacolle, R. Belikov, H. Sagberg, O. Solgaard, A. Sudbø, “Algorithms for the synthesis of complex-value filters with an array of micromechanical mirrors,” Optics Express, vol.14(26), pp.12590-12612 (December 2006), ISSN 1094-4087.
  13. M. Wu, O. Solgaard, J. Ford, “Optical MEMS for Light Wave Communication” (Invited Paper), Journal of Lightwave Technology, vol. 24, no. 12, December 2006, pp. 4433-4454.
  14. K. Yu, D. Lee, N. Park, O. Solgaard, “Tunable Optical Bandpass Filter with Variable-Aperture MEMS Reflector”, Journal of Lightwave Technology, vol. 24, no. 12, December 2006, pp. 5095- 5102.
  15. C-C. Chen, J-S. Wang, O. Solgaard, “Micromachined bubble-jet cell sorter with multiple operation modes," Sensors and Actuators B: Chemical Volume 117, no. 2, 12 October 2006, pp. 523-529.
  16. K. Carlson Maitland, H.J. Shin, H. Ra, D. Lee, O. Solgaard, R. Richards-Kortum: “Single fiber confocal microscope with a two-axis gimbaled MEMS scanner for cellular imaging”, OPTICS EXPRESS, Vol. 14, No. 19, pp. 8604-8612, 18 September 2006.
  17. S. Zappe, M. Fish, M.P. Scott, O. Solgaard, “Automated MEMS-based Drosophila embryo injection system for high-throughput RNAi screens”, Lab on a Chip, vol.6, no.8, pp.1012-1019, August 2006.
  18. W. Piyawattanametha, R.P.J. Barretto, T.H. Ko, B.A. Flusberg, E.D. Cocker, H. Ra, D. Lee, O.Solgaard. M.J. Schnitzer, “Fast-scanning Two-photon Fluorescence Imaging Based on a Microelectromechanical Systems Two-dimensional Scanning Mirror”, Optics Letters, vol. 31, no.13, July 1 2006, pp. 2018-2020.
  19. K. Yu, D. Lee, U. Krishnamoorthy, N. Park, O. Solgaard, "Micromachined Fourier transform spectrometer on silicon optical bench platform," Sensors and Actuators, A-Phys., vol. 130-131, pp. 523-530, 2006.
  20. X. Li, C. Antoine, D. Lee, J.-S. Wang, O. Solgaard, “Tunable Blazed Gratings“, Journal of Microelectromechanical Systems, vol. 15, no. 3, June 2006, pp. 597-604.
  21. I.W. Jung, U. Krishnamoorthy, O. Solgaard, “High Fill-Factor Two-Axis Gimbaled Tip-Tilt-Piston Micromirror Array Actuated by Self-Aligned Vertical Combdrives“, Journal of Microelectromechanical Systems, vol. 15, no. 3, June 2006, pp. 563-571.
  22. P. Ebrahimi, K. Yu, M.C. Hauer, A.E. Willner, O. Solgaard, “Tunable Wavelength Demultiplexer and OCDMA Code Hopping Using a 10-us-Tuning MEMS-Actuated Gires–Tournois Filter”, IEEE Photonics Technology Letters, vol. 18, no. 12, June 15, 2006, pp.1398-1400.
  23. X. Zhang, M.P. Scott, C.F. Quate, O. Solgaard, “Microoptical Characterization of Piezoelectric Vibratory Microinjections in Drosophila Embryos for Genome-Wide RNAi Screen”, Journal of Microelectromechanical Systems (JMEMS), vol. 15, no. 2, April 2006, pp. 277-286.
  24. K.B. Crozier, V. Lousse, O. Kilic, S. Kim ,W. Suh, S. Fan, O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths”, Physical Review B (Condensed Matter and Materials Physics); 15 March 2006; vol.73, no.11, p.115126-1-14.

  25. 2005 top

  26. J.-S. Wang, S. Hafeman, A. R. Neureuther, and O. Solgaard, "Effects of Through-Focus Symmetry in Maskless Lithography Using Micromirror Arrays", Journal of Vacuum Science and Technology B, Vol. 23, No.6, pp.2738-2742 (November/December 2005).
  27. M. Lacolle, H. Sagberg, I.-R. Johansen, O. Løvhaugen, O. Solgaard, A. Sudbo, “Reconfigurable Near-Infrared Optical Filter with Micromechanical Diffractive Fresnel Lens”, IEEE Photonics Technology Letters; December 2005; vol.17, no.12, pp. 2622-224.
  28. X. Zhang, C.-C. Chen, R.W. Bernstein, S. Zappe, M.P. Scott, O. Solgaard, O. “ Microoptical Characterization and Modeling of Positioning Forces on Drosophila Embryos Self-Assembled in Two-Dimensional Arrays”, Journal of Microelectromechanical Systems, Volume 14, no. 5, October 2005, pp.1187-1197.
  29. W. Suh, O. Solgaard, S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs”, Journal of Applied Physics, vol. 98,issue 3, article 033102, 1 August 2005, (4 pages). (Selected for the August 22, 2005 issue of Virtual Journal of Nanoscale Science & Technology, a compilation of links to articles from participating publishers at http://www.vjnano.org )
  30. X. Zhang, C.-C. Chen, M.P. Scott, O. Solgaard, “Micro-optical characterization of fluidic selfassembly of Drosophila embryos through surface tension: principle, simulation and experiments”, Optical Review; July-Aug. 2005; vol.12, no.4, p.352-7.

  31. 2004 top

  32. O. Kilic, S. Kim, W. Suh, Y.-A. Peter, A. S. Sudbø, M.F. Yanik, S. Fan, O. Solgaard, “Photonic crystal slabs demonstrating strong broadband suppression of transmission in the presence of disorders”, Optics Letters vol. 29, No. 23, December 1, 2004, pp.2782-2784.
  33. H. Wada, D. Lee, S. Zappe, O, Solgaard, “Analysis of resonant frequency of fast scanning micromirror with vertical combdrives”, IEICE Transactions on Electronics; Nov. 2004; vol.E87-C, no.11, pp.2006-2008.
  34. J.-S. Wang, I.-W. Jung, O. Solgaard, “Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography”, Sensors and Actuators: A Physical, Vol. 114, issue 2-3, 1 September 2004, pp. 528-535.
  35. D. Lee, U. Krishnamoorthy, K. Yu, O. Solgaard, “Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability”, Sensors and Actuators: A Physical, Vol. 114, issue 2-3, 1 September 2004, pp. 423-428.
  36. O. Sahin, G. Yaralioglu, R. Grow, S. F. Zappe, A. Atalar, C. Quate, O. Solgaard, “High-resolution imaging of elastic properties using harmonic cantilevers”, Sensors and Actuators: A Physical, Vol. 114, issue 2-3, 1 September 2004, pp. 183-190.
  37. X.J. Zhang, S. Zappe, R.W. Bernstein, C.C. Chen, O. Sahin, M. Fish, M.P. Scott, O. Solgaard, Micromachined Silicon Force Sensor Based on Diffractive Optical Encoders for Characterization of Microinjection”, Sensors and Actuators: A Physical, Vol. 114, issue 2-3, 1 September 2004, pp. 197- 203.
  38. R.W. Bernstein, X.J. Zhang, S. Zappe, M. Fish, M.P. Scott, O. Solgaard, “Characterization of Fluidic Microassembly For Immobilization and Positioning of Drosophila Embryos”, Sensors and Actuators: A Physical, Vol. 114, issue 2-3, 1 September 2004, pp. 191-196.
  39. C.C. Chen, S. Zappe, O. Sahin, X.J. Zhang, E. Furlong, M. Fish, M.P. Scott, O. Solgaard, “Design and Operation of a Microfluidic Sorter for Drosophila Embryo”, Sensors and Actuators: B Chemical, Vol. 102, issue 1, September 2004, pp. 59-66.
  40. H. Wada, D. Lee, S. Zappe, U. Krishnamoorthy, O, Solgaard, “Lithography process for trench pattern above large cavity to fabricate fast scanning micromirror”, IEICE Transactions on Electronics; Aug. 2004; vol.E87-C, no.8, pp.1395-1398.
  41. K. Yu, O. Solgaard, “Tunable Optical Transversal Filters Based on a Gires-Tournois Interferometer with MEMS Phase Shifters”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, no. 3, May/June, 2004, pp. 588-597.
  42. H. Sagberg, M. Lacolle, I-R. Johansen, O. Løvhaugen, R. Belikov, O. Solgaard, A. Sudbø, Micromechincal Gratings for Visible and Near-Infrared Spectroscopy”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, no. 3, May/June, 2004, pp. 604-613.
  43. O. Sahin, C.F. Quate, O. Solgaard, A. Atalar, “Resonant harmonic response in tapping-mode atomic force microscopy”, Phys. Rev. B, vol. 69, no. 16, article 165416, (9 pages), April 2004.
  44. V. Lousse, W. Suh, O. Kilic, S. Kim, O. Solgaard, S. Fan, “Angular and polarization properties of a photonic crystal slab mirror”, Optics Express, vol. 12, no. 8, April 19, 2004. pp. 1575-1582.
  45. H. Wada, D. Lee, S. Zappe, U. Krishnamoorthy, O Solgaard, “Snap Down Voltage of a Fast-Scanning Micromirror with Vertical Electrostatic Combdrives”, Japanese Journal of Applied Physics, vol. 43, no. 2B, February 2004, pp. L284-L286.
  46. H. Wada, D. Lee, S. Zappe, U. Krishnamoorthy, O Solgaard, “Bonding of Two Silicon Layers above a Gap to Fabricate a Fast Scanning Micromirror”, Japanese Journal of Applied Physics, vol. 43, no. 1A/B, 2004, 15 Jan. 2004, pp. L50-L52.

  47. 2003 top

  48. H. Wada, D. Lee, S. Zappe, O Solgaard, “The Torque of High Speed Scanning Micromirrors with Vertical Combdrives”, Japanese Journal of Applied Physics, vol. 42, part 2, no. 12A, 1 December 2003, pp. L1449-L1451.
  49. I. Keslassy, S.-T. Chuang, K. Yu, D. Miller, M. Horowitz, O. Solgaard, N. McKeown, “Scaling Internet Routers Using Optics”, Proceedings of SIGCOMM’03, August 25-29, 2003, Karlsruhe, Germany, pp. 189-200, Computer Communication Review; Oct. 2003; vol.33, no.4, p.189-200.
  50. H. Sagberg, A. Sudbo, O. Solgaard, K.A. Hestnes Bakke, I.-R. Johansen, “Optical Microphone Based on a Modulated Diffractive Lens”, IEEE Photonics Technology Letters; October 2003; vol.15,no.10, pp. 1431-1433.
  51. U. Krishnamoorthy, D. Lee, O. Solgaard, “ Self-Aligned Vertical Electrostatic Combdrives for Micromirror Actuation””, IEEE Journal of MicroElectroMechanical Systems (JMEMS), vol. 12, no.4, pp. 458-464, August 2003.
  52. K. Yu, O. Solgaard, “MEMS optical wavelength deinterleaver with continuously variable channel spacing and center wavelength”, IEEE Photonics Technology Letters; March 2003; vol.15, no.3, pp. 425-427.
  53. W. Suh, M. F. Yanik, O. Solgaard, and S.-H. Fan, “Displacement-Sensitive Photonic Crystal Structures Based on Guided Resonance in Photonic Crystal Slabs,” Appl. Phys. Lett., Vol. 82 (13), 31 March 2003, pp. 1999-2001.
  54. R. Belikov, O. Solgaard, “Optical Wavelength Filtering by Diffraction from a Surface Relief, Optics Letters vol. 28, No. 6, March 15, 2003, pp.447-449. Erratum in Optics Letters vol. 28, No. 12, June 15, 2003, pp.1055.

  55. 2002 top

  56. H. Wada, D. Lee, K. Yu, U. Krishnamoorthy, O. Solgaard, “Optical Characterization of High Speed Scanning Micromirrors with Vertical Combdrives”, Japanese Journal of Applied Physics, vol. 41, part 2, no. 10B, 15 October 2002, pp. L1169-L1171.
  57. H. Wada, D. Lee, U. Krishnamoorthy, S. Zappe, O. Solgaard, “Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives”, Japanese Journal of Applied Physics, vol. 41, part 2, no. 8A, 1 August 2002, pp. L899-L901.
  58. U. Krishnamoorthy, K. Li, K. Yu, D. Lee, J.P. Heritage, O. Solgaard, "Dual mode micromirrors for optical phased array applications", Sensors and Actuators: A. Physical, Vol. A97-98, 1 April 2002, pp 21-26.
  59. K. Li, U. Krishnamoorthy, J.P. Heritage, O. Solgaard “Coherent micromirror arrays”, Optics Letters Vol. 27, No. 5, March 1, 2002 p.366-368.

  60. Pre 2002 top

  61. E. Mao, D. R. Yankelevich, C.-C. Lin, O. Solgaard, A. Knoesen, J.S. Harris, “Narrow-band light emission in semiconductor-fibre asymmetric waveguide coupler”, Electronics Letters (UK), vol.36, (no.16), IEE, pp.1378-1379, 3 August 2000.
  62. P.M. Hagelin, U. Krishnamoorthy, J.P. Heritage, O. Solgaard, "Scalable Optical Cross-Connect Switch Using Micromachined Mirrors", IEEE Photonics Technology Letters, vol. 12, no. 7, pp. 882- 885, July 2000.
  63. D.R. Pedersen, O. Solgaard, "Free-Space Communication Link Using a Grating Light Modulator",Sensors and Actuators, A 83, pp.6-10, 22 May 2000.
  64. R.A. Conant, P.M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K.Y. Lau, R.S. Muller, "A raster-scanning full-motion video display using polysilicon micromachined mirrors," Sensors & Actuators A, Vol. 83, no. 1-3, 22 May 2000, pp 291-296.
  65. E. Mao, C.W. Coldren, J.S. Harris, D. R. Yankelevich, O. Solgaard, A. Knoesen, “GaAs/AlGaAs multiple-quantum-well in-line intensity modulator”, Applied Physics Letters, vol. 75, no. 3, pp. 310-312, 19 July 1999.
  66. P.M. Hagelin, O. Solgaard, “Optical Raster-Scanning Displays Based on Surface-Micromachined Polysilicon Mirrors”, IEEE Journal of Selected Topics in Quantum Electronics, vol. 5, no. 1, pp. 67-74, January/February 1999.
  67. M-H. Kiang, O. Solgaard, K.Y. Lau, R.S. Muller, "Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning”, IEEE Journal of MicroElectroMechanical Systems (JMEMS), vol. 7, no. 1, pp. 27-37, March 1998.
  68. D.A. Francis, M.-H. Kiang, O. Solgaard, K.Y. Lau, R.S. Muller, C.J. Chang-Hasnain, “Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner”, Electronics Letters (UK), vol.33, (no.13), IEE, pp.1143-5, 19 June 1997.
  69. M-H. Kiang, O. Solgaard, R.S.Muller, K.Y. Lau, "Micromachined Polysilicon Microscanners for Barcode Readers”, IEEE Photonics Technology Letters, vol. 8, no. 12, pp. 1707-1709, December 1996.
  70. M.J. Daneman, N. C. Tien, O. Solgaard, A.P. Pisano, K. Y. Lau, R. S. Muller, “Linear Microvibromotor for Positioning Optical Components”, IEEE Journal of MicroElectroMechanical Systems (JMEMS), vol. 5, no. 3, pp. 159-165, September 1996.
  71. N.C. Tien, O. Solgaard, M.-H. Kiang, M. Daneman, K.Y. Lau, R.S. Muller, “Surface-Micromachined Mirrors for Laser-Beam Positioning”, Sensors and Actuators A (Physical); March- April 1996; vol.A52, no.1-3, p.76-80.
  72. M. Daneman, O. Solgaard, N.C. Tien, K.Y. Lau, R.S. Muller, "Laser-to-fiber Coupling Module Using a Micromachined Alignment Mirror”, IEEE Photonics Technology Letters, vol. 8, no. 3, pp. 396-398, March 1996.
  73. M-H. Kiang, O. Solgaard, R.S. Muller, K.Y. Lau, "Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers", IEEE Photonics Techn. Letters, vol.8, no. 1, pp.95-97, January 1996.
  74. J.B. Georges, D. Cutrer, O. Solgaard, K.Y. Lau, "Optical Transmission of Narrowband Millimeter- Wave Signals", IEEE Transactions on microwave theory and techniques, vo. 43. no.9, pp.2229- 2240, September 1995.
  75. O. Solgaard, M. Daneman, N.C. Tien, A. Friedberger, R.S. Muller, K.Y. Lau, "Optoelectronic packaging using silicon surface-micromachined alignment mirrors", IEEE Photonics Techn. Letters, vol.7, no. 1, pp.41-43, January 1995.
  76. J.B. Georges, J. Park, O. Solgaard, P. Pepeljugoski, M. Sayed, K.Y. Lau, "Transmission of 300 Mb/s BPSK at 39 GHz Using Feedforward Optical Modulation", Electronics Letters, vol. 30, no. 2, pp.160-161 20 January 1994.
  77. J.B. Georges, L.A. Buckman, D. Vassilovski, J. Park, M.-H. Kiang, O. Solgaard, K.Y. Lau, "Stable Picosecond Pulse Generation at 46 GHz by Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop", Electronics Letters, vol. 30, no. 1, pp.69-71, 6 January 1994.
  78. O. Solgaard, K. Y. Lau, "Optical Feedback Stabilization of the Intensity Oscillations in Ultra-high Frequency, Passively Modelocked, Monolithic, Quantum Well Lasers", Photonics Techn. Lett., vol. 5, no. 11, pp. 1264-1267, November 1993.
  79. O. Solgaard, M. H. Kiang, K. Y. Lau, "Pulse buildup in passively mode-locked quantum-well semiconductor lasers", Applied Physics Letters, vol. 63 (15), pp.2021-2023, 11 October 1993.
  80. O. Solgaard, J. Park, J.B. Georges, P. Pepeljugoski, K. Y. Lau, "Millimeter-Wave Frequency, Multi- Gigahertz Optical Modulation by Feedforward Phase Noise Compensation of a Beat Note Generated by Photomixing of Two Laser Diodes", IEEE Photonics Techn. Letters, vol. 5, no. 5, pp.574-577, May 1993.
  81. O. Solgaard, F. Ho, J. I. Thackara, D. M. Bloom, "An Attenuated Internal Reflection Modulator", Applied Physics Letters, vol. 61 (21), pp. 2500-2502, 23 November 1992.
  82. O. Solgaard, F. S. A. Sandejas, D. M. Bloom, "A deformable grating optical modulator", Optics Letters, vol. 17, no. 9, pp. 688-690, 1 May 1992.
  83. O. Solgaard, A.A. Godil, B.R. Hemenway, D.M. Bloom, "All Silicon Integrated Optical Modulator", IEEE J. on Selected Areas in Communication on "Integrated Circuits for Lightwave Technologies", vol. 9, no. 5, pp. 704-710, June 1991.
  84. O. Solgaard, A.A. Godil, B. R. Hemenway, D.M. Bloom, "Pigtailed Single Mode Fiber Optic Light Modulator in Silicon", IEEE Phot. Techn. Letters, vol. 2, no. 9, pp. 640-642, Sept. 1990.
  85. B. R. Hemenway, O. Solgaard, A. A. Godil, D. M. Bloom, "A Polarization-Independent Silicon Light Modulator for 1.32 µm Fiber Optics", IEEE Photonics Techn. Letters, vol. 2, no. 4, pp. 262-264, April 1990.
  86. B. R. Hemenway, O. Solgaard, D. M. Bloom, "All- silicon Integrated Optical modulator for 1.3 µm Fiber-optic Interconnects", Appl. Physics Letters, vol. 55, no 4, pp. 349- 350, 24 July 1989.

Refereed Conference Papers

top

2007

  1. O. Solgaard, “Optical MEMS Based on High-Reflectivity Photonic Crystals”, 2007 IEEE/LEOS Annual Meeting Conference Proceedings, Lake Buena Vista, Florida, 21-25 October 2007, pp. 765-766 (invited).
  2. S. Hadzialic, S. Kim, A. Sudbø, O. Solgaard, “Displacement Sensing with a Mechanically Tunable Photonic Crystal”, 2007 IEEE/LEOS Annual Meeting Conference Proceedings, Lake Buena Vista, Florida, 21-25 October 2007, pp. 345-346.
  3. S. Hadzialic, S. Kim, S. Basu Mallick, A. Sudbø, O. Solgaard, “Monolithic Photonic Crystals”, 2007 IEEE/LEOS Annual Meeting Conference Proceedings, Lake Buena Vista, Florida, 21-25 October 2007, pp. 341-342.
  4. C. Antoine, X. Li, D. Sesko, O. Solgaard, “An External Cavity Tunable Laser with a Low-Loss Narrowband MEMS Tunable Blazed Grating”, 2007 IEEE/LEOS Annual Meeting Conference Proceedings, Lake Buena Vista, Florida, 21-25 October 2007, pp. 834-835.
  5. D. Lee, O. Solgaard, “Pull-in Analysis of Scanners Actuated by Electrostatic Vertical Combdrives”, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, 12-16 August 2007, pp. 85-86.
  6. I.W. Jung, J-S. Wang, O. Solgaard, “Vortex Generation and Pixel Calibration Using a Spatial Light Modulators for Maskless Lithography”, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, 12-16 August 2007, pp. 147-148.
  7. W. Piawattananmetha, E.D Crocker, R.P.J. Barretto, J.C. Jung, B.A. Flusberg, H. Ra, O. Solgaard, M. Schnitzer, “A Portable Two-photon Fluorescence Microendoscope Based on a Two-dimensional Scanning Mirror”, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, 12-16 August 2007, pp. 6-7.
  8. I.-W. Jung, S. Kim, O. Solgaard, “High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner “, Transducers &Eurosensors’07, The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007, pp. 1513-1516.
  9. W. Piyawattanametha, H. Ra, M. J. Mandella, J.T.C. Liu,3, L.K. Wong, C.B. Du, T.D. Wang, C.H. Contag, G.S. Kino, O. Solgaard, “Three-Dimensional In Vivo Real Time Imaging By A Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS Scanner”, Transducers & Eurosensors’07, The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007, pp. 439-442.
  10. H. Ra, W. Piyawattanametha, M. J. Mandella, J.T.C. Liu,3, L.K. Wong, T.D. Wang, C.H. Contag, G.S. Kino, O. Solgaard, “Three-Dimensional in vivo Reflectance and Fluorescence Imaging by a Handheld Dual-Axes Confocal Microscope, Conference on Lasers and Electro-Optics (CLEO) 2007, Baltimore, MD, Paper CTuEE1.
  11. S. Kim, S. Hadzialic, A. Sudbo, O. Solgaard, “Single-film Broadband Photonic Crystal Micro-mirror with Large Angular Range and Low Polarization Dependence”, Conference on Lasers and Electro- Optics (CLEO) 2007, Baltimore, MD, Paper CThP7.
  12. O. Solgaard, “Diffractive Optical Modulators Based on MEMS Technology”, Invited plenary presentation at the 2007 SPIE Photonic West Conference, MOEMS and MEMS 2007, San Jose,California, 22 January 2007.
  13. H. Ra, W. Piyawattanametha, Y. Taguchi, D. Lee, O. Solgaard, “Dual-axes confocal microscopy with a MEMS scanner for reflectance and fluorescence imaging (invited talk)”, 2007 SPIE Photonic West Conference, MOEMS and Miniaturized Systems VI, San Jose, California, 24 January 2007.
  14. W. Piyawattanametha, H. Ra, M.J. Mandella, J.T.C. Liu, L.K. Wong, P. Hsiung, C.H. Contag, G.S. Kino, T.D. Wang, O. Solgaard, “MEMS Based Dual-axes Confocal Microscope for in-vivo Imaging”, 2007 SPIE Photonic West Conference, Endoscopic Microscopy II, San Jose, California, 21 January 2007.
  15. W. Piyawattanametha, B.A. Flusberg, R.P.J. Baretto, J.C. Jung, T.H. Ko, E.D. Cocker, H. Ra, D.Lee, O. Solgaard, M.J. Schnitzer, “Toward portable two-photon fluorescence micro-endoscopy using a two-dimensional microelectromechanical (MEMS) scanning mirror”, 2007 SPIE Photonic West Conference, Multiphoton Microscopy in the Biological Sciences VII, San Jose, California, 22 January 2007.
  16. C.L. Hoy, N.J. Durr, S. Douglass, S. Mallick, O. Solgaard, A. Ben-Yakar, “A compact 15-mm wide two-photon microscope for imaging and femtosecond laser microsurgery”, 2007 SPIE Photonic West Conference, Multiphoton Microscopy in the Biological Sciences VII, San Jose, California, 22 January 2007.
  17. M.J. Mandella, J.T.C. Liu, W. Piyawattanametha, H. Ra, P. Hsiung, L.K. Wong, O. Solgaard, T.D. Wang, C.H. Contag, G.S. Kino,“Compact optical design for a dual-axes confocal endoscopic microscope”, 2007 SPIE Photonic West Conference, Three-dimensional and Multidimensional Microscopy: Image Acquisition and Processing XIV, San Jose, California, 24 January 2007.
  18. K. Yu, H. Lee, N. Park, D. Lee, O. Solgaard, “Optical Bandpass Filter with Tunable Chromatic Dispersion and Optical Bandwidth Using a Variable MEMS Reflector”, Technical Digest of the 2007 Optical Fiber Communication Conference (OFC 07), Anaheim, California, March 25-29, 2007.

  19. 2006 top

  20. O. Kilic, M. Digonnet, G. Kino, O. Solgaard, “External Fiber Fabry-Perot Acoustic Sensor Based on Photonic Crystal Mirror”, Technical Digest of the 2006 18th International Conference on Optical Fiber Sensors Topical Meeting (OFS-18), Gran Meliá Cancún Convention Center, Cancun, Mexico, October 23-27, 2006.
  21. K. Yu, N. Park, D. Lee, O. Solgaard, “Micromirror-based scan range enhancement in Fourierdomain optical coherence tomography”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 42-43.
  22. I.W. Jung, J-S. Wang, O. Solgaard, “Spatial Light Modulators for Maskless Lithography”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 150-151.
  23. I.W. Jung, Yves-Alain Peter, Emily Carr, J-S. Wang, O. Solgaard, “Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 152-153.
  24. W. Piyawattanametha, J.T.C. Liu, M.J. Mandella, H. Ra, L.K. Wong, P. Hsiung, T.D. Wang, G.S. Kino, O. Solgaard, “MEMS Based Dual-axes Confocal Reflectance Handheld Microscope for in vivo Imaging”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 164-165.
  25. H. Ra, W. Piyawattanametha, Y. Taguchi, O. Solgaard, ”Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 166-167.
  26. C. Antoine, X. Li, J-S. Wang, O. Solgaard, “A reconfigurable optical demultiplexer based on a MEMS deformable blazed grating”, 2006 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, Montana, 21-24 August 2006, pp. 183-184.
  27. O. Solgaard, “Wavelength Control with MEMS and Photonic Crystals”, (invited talk) Presented at the 2006 Northern Light Conference, Bergen, Norway June 14th-16th.
  28. M. Lacolle, H. Sagberg, I.-R. Johansen, O. Løvhaugen, A. Sudbø, O. Solgaard, “Micromechanical Diffractive Optical Filters for Spectroscopy”, Technical Digest of the 2006 Northern Light Conference, Bergen, Norway June 14th-16th, p. 55.
  29. J. Blad, A. Sudbø, O. Solgaard, “Photonic Crystals as Angle-Insensitive Broadband Mirrors,Technical Digest of the 2006 Northern Light Conference, Bergen, Norway June 14th-16th, p. 123.
  30. O. Kilic, S. Fan, O. Solgaard, “Dual quarter-wave retardation based polarization beam splitting in photonic crystal slabs”, Technical Digest of the Topical Meeting on Photonic Metamaterials: From Random to Periodic, Grand Island, The Bahamas, June 5-8, 2006, paper ThD1 (3 pages).
  31. K. Carlson, H.J. Shin, H. Ra, D. Lee, O. Solgaard, R. Richards-Kortum, “Single Fiber Confocal Microscope Using a Two-Axis Microscanner for Cellular Imaging, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Long Beach, CA, May 21-26, 2006, paper CMR4.
  32. W. Piyawattanametha, R.P.J. Barretto, T.H. Ko, B.A. Flusberg, E.D. Cocker, H. Ra, D. Lee, O. Solgaard. M.J. Schnitzer, “Fast-scanning Two-photon Fluorescence Imaging Using a Microelectromechanical Systems (MEMS) Two-dimensional Scanning Mirror”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Long Beach, CA, May 21-26, 2006, paper CMMM5.
  33. K. Yu, N. Park, D. Lee, O. Solgaard, “Compact Laser Scanning Distance Sensor with a Two-axis Gimbaled Microscanner for Volumetric Imaging”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Long Beach, CA, May 21-26, 2006, paper CWL5.
  34. K. Yu, N. Park, D. Lee, O. Solgaard, “Superresolution Image Enhancement in Digital Photomicrography by Subpixel Translation using a Scanning Micromirror”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Long Beach, CA, May 21-26, 2006, paper JTuD54.
  35. I.-S. Joe, O. Solgaard, “High Capacity Optical Packet Switch Based on a Waveguide Grating Router Operated over Multiple FSRs”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Long Beach, CA, May 21-26, 2006, paper CThHH2.
  36. E. Carr, S. Olivier, O. Solgaard, “Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications”, MEMS/MOEMS Components and Their Applications III, San Jose, CA, 2006, Proceedings of SPIE Vol. 6113, pp. 61130T-1 to 61130T-9 (2006).
  37. J.-S. Wang, O. Solgaard, A. R. Neureuther, "High-sensitivity interferometric schemes for ML2 micromirror calibrations," presented at the Emerging Lithographic Technologies X conference, San Jose, CA, USA, 19–24 February, 2006, SPIE Proc. 6151, p. 615112/1-615112/8.

  38. 2005 top

  39. I.-S. Joe, O. Solgaard, “Scalable optical switch fabric for avionic networks,” Proceedings of Avionics Fiber-Optics and Photonics, Institute of Electrical and Electronics Engineers, Minneapolis, 2005, pp.19–20.
  40. D. Lee, O. Solgaard, “Silicon Masking Layers for Fabrication of High Aspect Ratio MEMS”, Proc. 2005 IEEE/LEOS International Conf. on Optical MEMS and Their Applications, Oulu, Finland, 1-4 August 2005, pp. 85-86.
  41. M. Lacolle, H. Sagberg, D. Lee, O. Solgaard, I-R. Johansen, O. Løvhaugen, A. Sudbø, “A Micro- Mechanical Fresnel Lens for Spectral Filtering“, Conference digest for the 17th International Conference on Photonics in Europe, CLEO/EQEC 2005, Munich ICM, 12-17 June 2005 Europhysics Conference Abstracts: Volume 29B, paper CK2-2-THU.
  42. C-C. Chen, J-S. Wang, S. Zappe, X. Zhang, O. Solgaard, “Design and Operation of a Micromachined Bubble-Jet Cell Sorter”, Proceedings of the 13th International Conference on Solid- State Sensors, Actuators and Microsystems (Transducers ’05), Seoul, Korea, June 5-9, 2005, pp. 441-444.
  43. K. Yu, D. Lee, U. Krishnamoorthy, N. Park, O. Solgaard, “Micromachined Fourier Transform Spectrometer on Silicon Optical Bench Platform”, Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’05), Seoul, Korea, June 5-9, 2005, pp. 1250-12541.
  44. J.-S. Wang, S. Hafeman, A. R. Neureuther, O. Solgaard, "Understanding Through-Focus Symmetry in Maskless Lithography Using Micromirror Arrays", Technical Digest of The 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Orlando, FL, May 31-June 3, 2005, paper W1.2, pp. 14-15.
  45. O. Kilic, S. Kim, M. Digonnet, G. Kino, O. Solgaard, “Excitation of Non-Degenerate Resonances through Breaking of Mirror Symmetry in Photonic Crystal Slabs”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Baltimore, MA, May 22-27, 2005, paper CTuL1.
  46. W. Suh, O. Solgaard, S. Fan, “Near-Field Sensor Using Photonic Crystal Slabs”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Baltimore, MA, May 22-27, 2005, paper CTuL4.
  47. K. Yu, N. Park, D. Lee, O. Solgaard, “ A wavelength selective switch with flat passband using a free-space grating and MEMS phase-shifters”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Baltimore, MA, May 22-27, 2005, paper JTuC67.
  48. H-J. Ra, I-W. Jung, D. Lee, U. Krishnamoorthy, K. Yu, O. Solgaard, „High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes”, Proceedings of SPIE Volume: 5721, MOEMS Display and Imaging Systems III, Jan 2005, pp. 132-135.

  49. 2004 top

  50. K. Yu, D. Lee, O. Solgaard, “Variable Bandwidth Optical Filters with Vertical Micromirrors and Silicon Optical Bench Alignment Technology”, 2004 IEEE/LEOS Annual Meeting Conference Proceedings, Rio Grande, Puerto Rico, 7-11 November, 2004, pp. 531-532.
  51. X. Li, D. Lee, R. Belikov, K. Yu, O. Solgaard, “Tunable Optical Wavelength Deinterleaver based on Tunable MEMS Blazed Gratings”, 2004 IEEE/LEOS Annual Meeting Conference Proceedings, Rio Grande, Puerto Rico, 7-11 November, 2004, pp. 320-321.
  52. S. Zappe, M. Fish, M.P. Scott, O.Solgaard, “Automated MEMS Based Fruit Fly Embryo Injection System for Genome-Wide High-Throughput RNAi Screens”, Proceedings of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, September 26-30, 2004, Malmo, Sweden, pp. 183-185.
  53. Micromirror Array Actuated by Self-Aligned Vertical Electrostatic Combdrives”, Proc. 2004 IEEE/LEOS International Conf. on Optical MEMS, Takamatsu, Kagawa, Japan, 22-26 August 2004, pp. 208-209.
  54. J.-S. Wang, Y. Chen, O. Solgaard, “Surface Micromachined Elastomer Spatial Light modulators for Extreme Ultra violet Radiation”, Proc. 2004 IEEE/LEOS International Conf. on Optical MEMS, Takamatsu, Kagawa, Japan, 22-26 August 2004, pp. 212-213.
  55. X. Zhang, S.F. Zappe, C. F. Quate, M. P. Scott, O. Solgaard “Ultrasonic Microinjection Characterized by Integrated Micro-optical Force Encoder”, Proceedings of the Solid-State Sensor and Actuator Workshop, pp. 184-187, Hilton Head, South Carolina, June 6-10, 2004.
  56. D. Lee, O. Solgaard “Two-Axis Gimbaled Microscanner in Double SOI Layers Actuated by Self- Aligned Vertical Electrostatic Combdrive”, Proceedings of the Solid-State Sensor and Actuator Workshop, pp. 352-355, Hilton Head, South Carolina, June 6-10, 2004.
  57. R. Belikov, C. Antoine-Snowden, O. Solgaard, “Tunable external cavity laser with a stationary deformable MEMS grating.,” Conference on Lasers and Electro-Optics (CLEO), Technical Digest, San Francisco, CA, May 16-21, 2004, paper CWL3.
  58. K.B. Crozier, S. Kim, O. Kilic, W. Suh, S. Fan, O. Solgaard, “Two-Dimensional Photonic Crystals at Visible Wavelengths” Conference on Lasers and Electro-Optics (CLEO), Technical Digest, San Francisco, CA, May 16-21, 2004, paper CWG2.
  59. P. Ebrahimi, M. Kargar, M.C. Hauer, A.E. Willner, K. Yu, O. Solgaard, “A 10-ms-tuning MEMS Actuated Gires-Tournois Filter for use as a Tunable Wavelength Demultiplexer and a Tunable OCDMA Encoder/Decoder”, Technical Digest of the 2004 Optical Fiber Communication Conference (OFC 04), paper no. ThQ2, Los Angeles, California, February 22-27, 2004.
  60. O. Solgaard, R. Belikov, K. Yu, “Interference-Based Optical MEMS Filters”, (invited talk),Technical Digest of the 2004 Optical Fiber Communication Conference (OFC 04), paper no. TuD3, Los Angeles, California, February 22-27, 2004.
  61. W. Suh, M.F. Yanik, O. Solgaard, S. Fan, “Mechanically switchable photonic crystal structures based on coupled photonic crystal slabs”, Proceedings of SPIE - The International Society for Optical Engineering, 2004, vol. 5360, p.299-306, Conference: Photonic Crystal Materials and Devices II; Jan 26-29 2004; San Jose, CA, United States

  62. 2003 top

  63. K. Yu, D. Lee, O. Solgaard, “Tunable Wavelength Multiplexer/Demultiplexer using a MEMS Gires- Tournois Interferometer”, 2003 IEEE/LEOS Annual Meeting Conference Proceedings, Tucson, Arizona, 26-30 October 2003, pp. 521-522.
  64. X.J. Zhang , S. Zappe, R.W. Bernstein, C.-C. Chen , O. Sahin, M. Scott, O. Solgaard, “High-Precision Characterization of Embryo Positioning Force Using MEMS Optical Encoder”, Proceedings of the 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems, October 5-9, 2003, Squaw Valley, California, USA, pp. 805-808.
  65. K. Yu, D. Lee, U. Krishnamoorthy, and O. Solgaard, “Tunable bandwidth optical filter based on MEMS Gires-Tournois Interferometer,” Proc. 2003 IEEE/LEOS International Conf. on Optical MEMS, Waikoloa, Hawaii, 18-21 August 2003, pp. 32-33.
  66. H. Sagberg, M. Lacolle, I.-R. Johansen, O. Lovhaugen, O. Solgaard, and A.S. Sudbo, “Configurable spectral filter with an array of diffraction gratings,” Proc. 2003 IEEE/LEOS International Conf. on Optical MEMS, Waikoloa, Hawaii, 18-21 August 2003, pp. 30-31.
  67. R. Belikov, C. Antoine-Snowden, and O. Solgaard, “Femtosecond Direct Space-to-Time Pulse Shaping with MEMS Micromirror Arrays,” Proc. 2003 IEEE/LEOS International Conf. on Optical MEMS, Waikoloa, Hawaii, 18-21 August 2003, pp. 24-25.
  68. H. Sagberg, M. Lacolle, A.S. Sudbo, O. Solgaard, “Configurable spectral filter with an array of diffraction gratings,” Proceedings of Northern Optics, Esppo, Helsinki University of Technology, Finland, 2003, pp. 27.
  69. X. J. Zhang, S. Zappe, R. W. Bernstein, O. Sahin, C.-C. Chen, M. Fish, M. Scott, and O. Solgaard, “Integrated Optical Diffractive Micrograting-Based Injection Force Sensor,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 1051-1054.
  70. J.-S. Wang, I. W. Jung, O. Solgaard, “Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 1458-1461.
  71. D. Lee, U. Krishnamoorthy, K. Yu, and O. Solgaard, “High-Resolution, High-Speed Microscanner in Single-Crystalline Silicon Actuated by Self-Aligned Dual-Mode Vertical Electrostatic Combdrive with Capability for Phased Array Operation,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 576-579.
  72. O. Sahin, G. Yaralioglu, R. Grow, S. F. Zappe, A. Atalar, C. Quate, and O. Solgaard, “Harmonic Cantilevers for Nanomechanical Sensing of Elastic Properties,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 1124-1127.
  73. C. C. Chen, S. Zappe, O. Sahin, X. J. Zhang, E. E. M. Furlong, M. Fish, M. Scott, and O. Solgaard, “Microfluidic Switch for Embryo and Cell Sorting,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 659-662.
  74. R. W. Bernstein, X. Zhang, S. Zappe, M. Fish, M. Scott, and O. Solgaard, “Characterization of Drosophila Embryos Immobilized by Fluidic Microassembly,” Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers ’03), Boston, MA, June 8-12, 2003, pp. 987-990.
  75. R. Belikov, X. Li, and O. Solgaard, “Programmable Optical Wavelength Filter Based on Diffraction From a 2-D MEMS Micromirror Array,” Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Baltimore, MD, June 1-6, 2003.
  76. O. Solgaard, K. Yu, U. Krishnamoorthy, K. Li, J.P. Heritage, “Microoptical phased arrays for spatial and spectral switching“, IEEE Communications Magazine, vol. 41, No. 3, March 2003, pp. 96-102.
  77. P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. S. Muller, S. Olivier, Y. -A. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang, “MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics,” Proc. SPIE, Vol. 4985, MOEMS Display and Imaging Systems, 28-29 January 2003, pp. 172-179.

  78. 2002 top

  79. R. W. Bernstein, X. J. Zhang, S. Zappe, M. Fish, M. Scott, and O. Solgaard, “Positioning and Immobilization of Drosophila Embryos in 2-D Arrays for Drug Injection,” Proc. uTAS 2002 Symposium, Nara, Japan, Vol. 2, 3-7 November 2002, pp. 682-684.
  80. S. Zappe, X. J. Zhang, I.-W. Jung, R. W. Bernstein, E. E. M. Furlong, M. Fish, M. Scott, and O. Solgaard, “Micromachined Hollow Needle with Integrated Pressure Sensor for Precise, Calibrated Injection Into Cells and Embryos,” Proc. uTAS 2002 Symposium, Nara, Japan, 3-7 November 2002, Vol. 2, pp. 793-795.
  81. H. Wada, D. Lee, K. Yu, U. Krishnamoorthy, S. Zappe, O. Solgaard, “High Speed MEMS Scanning Mirror with Vertical Comb Drive”, Technical Digest of the 3rd International Conference on Optics- Photonics Design and Fabrication “ODF2002, Tokyo”, October 30-November 1, 2002, pp. 29-30.
  82. O. Solgaard, “Dynamic Diffractive Optical Elements based on MEMS Technology”, (invited talk) Technical Digest of the 3rd International Conference on Optics-Photonics Design and Fabrication “ODF2002, Tokyo”, October 30-November 1, 2002, pp. 25-26.
  83. O. Solgaard, “Optical Communication with Coherent MEMS Arrays”, Invited talk at the 40th Annual Allerton Conference on Communication, Control, and Computing, Allerton House, Monticello, Illinois, October 2nd- 4th, 2002.
  84. K. Yu, O. Solgaard, “Tunable Chromatic Dispersion Compensators Using MEMS Gires-Tournois Interferometers”, Proceedings of the 2002 IEEE/LEOS International Conference on Optical MEMS, Lugano, Switzerland, 20-23 August 2002, pp. 181-182.
  85. Y.-A. Peter, E. Carr, O. Solgaard, “Segmented Deformable Micromirror for Free-Space Optical Communication”, Proceedings of the 2002 IEEE/LEOS International Conference on Optical MEMS, Lugano, Switzerland, 20-23 August 2002, pp. 197-198.
  86. K. Li, U. Krishnamoorthy, J.P. Heritage, O. Solgaard “Micromirror Array Phase Modulator for Ultrashort Optical Pulse Shaping”, Proceedings of the Solid-State Sensor and Actuator Workshop, pp. 15-18, Hilton Head, South Carolina, June 2-6, 2002.
  87. O. Solgaard, K. Yu, U. Krishnamoorthy, K. Li, J.P. Heritage, “Microoptical phased arrays for spatial and spectral switching”, (invited talk) Design, Test, and Packaging of MEMS/MOEMS 2002, 6-8 May 2002, Proceedings of the SPIE, vol. 4755, pp. 1-9, 2002.

  88. Pre 2002 top

  89. K.T. Cornett, B. Walker, E.J. Carr, J.P. Heritage, O. Solgaard, "Effects of Mirror Surface Deformation in Optical Delay Lines Based on Resonant-Scanning Micromirrors", 2001 IEEE/LEOS Annual Meeting Conference Proceedings, volume 2, pp. 855-856, 14-15 November 2001.
  90. K. Yu, O. Solgaard, “MEMS Switchable WDM De interleaver Based on a Gires-Tournois Interferometer”, 2001 IEEE/LEOS Annual Meeting Conference Proceedings, volume 2, pp. 417- 418, 14-15 November 2001.
  91. U. Krishnamoorthy, K.Li, K. Yu, D. Lee, J.P. Heritage, O. Solgaard, "Self-Aligned Vertical Combdrive Actuators for Optical Scanning Micromirrors", Proceedings of the 2001 IEEE/LEOS International Conference on Optical MEMS, Okinawa, Japan, 25-28 September 2001, pp. 41-42.
  92. U. Krishnamoorthy, K. Li, K. Yu, D. Lee, J.P. Heritage, O. Solgaard, "Dual Mode Micromirrors for Optical Phased Arrays Applications", Proceedings of the 11th International Conference on Solid- State Sensors and Actuators (Transducer ‘01), Munich, Germany, June 10-14, 2001, pp. 1294-1297.
  93. K. Li, U. Krishnamoorthy, J.P. Heritage, O. Solgaard, "Phased Arrays of Micromirrors for Programmable Shaping of Ultrashort Pulses", Conference on Lasers and Electro-Optics (CLEO), Technical Digest, Baltimore, May 2001, pp. 339-340.
  94. U. Krishnamoorthy, P.M. Hagelin, J.P. Heritage, O. Solgaard, "Surface-micromachined mirrors for scalable fiber optic switching applications", Proceedings of the SPIE Conference on MOEMS and Miniaturized Systems, Santa Clara, California, 18-20 September 2000, SPIE vol. 4178, pp. 270-277.
  95. M.V.P. Krueger, M.H. Guddal, R. Belikov, A. Bhatnagar, O. Solgaard, C. Spanos, K. Poolla, "Low Power Wireless Readout of Autonomous Sensor Wafer using MEMS Grating Light Modulator", Proceedings of the 2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, 21-24 August 2000, pp. 67-68.
  96. K.T. Cornett, J.P. Heritage, O. Solgaard "Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Micromirrors", Proceedings of the 2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, 21-24 August 2000, pp. 15-16.
  97. S.S. Olivier, P.A. Bierden, T.G. Bifano, D.J. Bishop, E. Carr, W.D. Cowan, M.R. Hart, M. Helmbrecht, P. Krulevitch, R.S. Muller, B. Sadoulet, O. Solgaard, J. Yu, “Micro-electro-mechanical systems spatial light modulator development”, Proceedings of the SPIE - The International Society for Optical Engineering, vol.4124, p.26-31, August 2000.
  98. K.T. Cornett, P.M. Hagelin, J.P. Heritage, O. Solgaard, M. Everett, “Miniature variable optical delay using silicon micromachined scanning mirrors”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest p.383-384, San Francisco, California, May 2000.
  99. D.R. Pedersen, O. Solgaard, "Micromachined grating light modulators for wireless sensor networks", Optical Society of America Annual Meeting, Santa Clara, California, September 28, 1999, p.86.
  100. V. Laible, P.M. Hagelin, O. Solgaard, E. Obermeier, “Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators”, Proceedings of the SPIE Conference on Micromachined Devices and Components V, Santa Clara, California, September 1999, SPIE vol. 3876, pp. 162-170.
  101. R.A. Conant, J. Nee, M. Hart, O. Solgaard, K.Y. Lau, R.S. Muller, “Robustness and Reliability of Micromachined Scanning Mirrors”, Proceedings of the 3rd International Conference on Micro Opto Mechanical Systems (Optical MEMS), MOEMS 99, Mainz, Germany, August 30-September 1, 1999, pp. 120-125.
  102. P.M. Hagelin, U. Krishnamoorthy, R. Conant, R. Muller, K. Lau, O. Solgaard, "Integrated Micromachined Scanning Display Systems", Technical Digest of the 18th Congress of the International Commission for Optics: Optics for the Next Millenium, SPIE vol. 3749, pp. 472-473, San Francisco, California, 2-6 August 1999.
  103. E. Mao, C.W. Coldren, J.S. Harris, D. R. Yankelevich, O. Solgaard, A. Knoesen, “A GaAs/AlGaAs narrow bandwidth in-line fiber filter”, Technical Digest of the 18th Congress of the International Commission for Optics: Optics for the Next Millenium, SPIE vol. 3749, pp. 94-95, San Francisco, California, 2-6 August 1999.
  104. P.M. Hagelin, U. Krishnamoorthy, C.M. Arft, J.P. Heritage, O. Solgaard, "Micromachined Scalable Fiber-Optic Switch", Technical Digest of the 1999 Optical Society of America, Photonics in Switching Conference, pp. 4-6, Santa Barbara, California, July 21-23, 1999.
  105. P.M. Hagelin, U. Krishnamoorthy, C.M. Arft, J.P. Heritage, O. Solgaard, "Scalable Fiber Optic Switch Using Micromachined Mirrors", Proceedings of the 1999 International Conference on Solid- State Sensors and Actuators (Transducer ‘99), pp. 782-785, Sendai, Japan, June 7-10, 1999.
  106. D.R. Pedersen, O. Solgaard, "Free-Space Communication Link Using a Grating Light Modulator", Proceedings of the 1999 International Conference on Solid-State Sensors and Actuators (Transducer ‘99), pp. 800-803, Sendai, Japan, June 7-10, 1999.
  107. R.A. Conant, P.M. Hagelin, U. Krishnamoorthy, O. Solgaard, K.Y. Lau, R.S. Muller, "A Raster- Scanning Full-Motion Video Display Using Polysilicon Micromachined Mirrors", Proceedings of the 1999 International Conference on Solid-State Sensors and Actuators (Transducer ‘99), pp. 376-379, Sendai, Japan, June 7-10, 1999.
  108. M.-H Kiang; O. Solgaard, K.Y. Lau, R.S. Muller, “Polysilicon optical microscanners for laser scanning displays”, Sensors and Actuators A (Physical) Sens. Actuators A, Phys. (Switzerland), vol.A70, (no.1-2), p.195-9, (9th International Solid State Sensors and Actuators Conference (Transducers '97), Chicago, IL, USA, 16-19 June 1997.) Elsevier, 1 Oct. 1998.
  109. P. Hagelin, K. Cornett, O. Solgaard, “Micromachined Mirrors in a Raster Scanning Display System”, Digest of the IEEE/LEOS Summer Topical Meeting on Optical MEMS, pp.109-110, Monterey, California, July 1998.
  110. E. Mao, C. Coldren, J.S. Harris, D. Yankelevich, O. Solgaard, A. Knoesen, “In-line fiber-optic filter using GaAs ARROW waveguide”, Conference on Lasers and Electro-Optics (CLEO), Technical Digest p.424-425, San Francisco, California, May 1998.
  111. O. Solgaard, “High-Resolution Silicon Surface Micromachined Displays” (invited talk), Technical Digest of the IEEE/LEOS IEEJ/SAMS 1997 International Conference on Optical MEMS and their Applications (MOEMS97), pp. 9-14, Nara, Japan, November 18-21, 1997.
  112. M.-H. Kiang, D.A. Francis, C.J. Chang-Hasnain, O. Solgaard, K.Y. Lau, R.S. Muller, "Actuated Polysilicon Micromirrors for Raster-Scanning Displays", Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators (Transducer ‘97), pp. 323-326, Chicago, June 16-19, 1997.
  113. M-H. Kiang, O. Solgaard, R.S.Muller, K.Y. Lau, "Micromachined microscanners for optical scanning”, SPIE vol. 3008, pp. 82-90, 1997.
  114. M-H. Kiang, O. Solgaard, R.S.Muller, K.Y. Lau, "High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning”, Late News paper at the Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, June 2-6, 1996.
  115. M. Daneman, N.C. Tien, O. Solgaard, K.Y. Lau, R.S. Muller, "Linear Vibromotor-Actuated Micromachined microreflector for Integrated Optical Systems”, Proceedings of the Solid-State Sensor and Actuator Workshop, pp. 109-112, Hilton Head, South Carolina, June 2-6, 1996.
  116. M-H. Kiang, O. Solgaard, R. S. Muller, K.Y. Lau, “Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications”, Proceedings of the Integrated Photonics research Conference, 1996 Technical Digest Series, vol. 6, Boston, MA, April 29-May 2, 1996, pp. 545-548.
  117. M. Daneman, N.C. Tien, O. Solgaard, K.Y. Lau, R.S. Muller, “Actuated Micromachined Microreflector with Two Degrees of Freedom for Integrated Optical Systems”, Proceedings of the Integrated Photonics research Conference, 1996 Technical Digest Series, vol. 6, Boston, MA, April 29-May 2, 1996, pp. 541-544.
  118. M-H. Kiang, O. Solgaard, R.S. Muller, K.Y. Lau, "Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners", proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) Workshop, pp. 192-197, San Diego, CA, February 11-15, 1996.
  119. N.C. Tien, M-H. Kiang, M. Daneman, O. Solgaard, K.Y. Lau, R.S. Muller, "Actuation of polysilicon surface-micromachined mirrors", Proceedings of SPIE’s Photonic West Conference, San Jose, CA, January 1996.
  120. N.C. Tien, M. Daneman, M-H. Kiang, O. Solgaard, K.Y. Lau, R.S. Muller, "Polysiliconmicromachined optical devices" (invited talk) Proceedings of the International Semiconductor Device Research Symposium, Charlottesville, VA, Dec. 6-8, 1995.
  121. M. Daneman, O. Solgaard, N.C. Tien, M-H. Kiang, R.S. Muller, K.Y. Lau, "Actuated micro-optical devices and systems on silicon" (invited talk) Digest of the Optical Society of America Annual Meeting, September 13, 1995.
  122. M. Daneman, O. Solgaard, N.C. Tien, R.S. Muller, K.Y. Lau, "Integrated Laser to Fiber Coupling Module Using a Micromachined Alignment Mirror" Conf. on lasers and electro- optics (CLEO), May 1995.
  123. M-H. Kiang, O. Solgaard, M. Daneman, N.C. Tien, R.S. Muller, K.Y. Lau, "High-precision Simicromachined micromirrors with on-chip actuation for external cavity semiconductor lasers", Conf. on lasers and electro- optics (CLEO), May 1995.
  124. N.C. Tien, O. Solgaard, M.-H. Kiang, M. Daneman, R.S. Muller, K.Y. Lau, "Surfacemicromachined mirrors for laser-beam positioning", Proceedings of the 8th international conference on solid-state sensors and actuators (Transducer -95), pp. 352-355, Stockholm, Sweden, June 25-29, 1995.
  125. O. Solgaard, N.C. Tien, M. Daneman, M.-H. Kiang, A. Friedberger, R.S. Muller, K.Y. Lau, "Precision and performance of polysilicon micromirrors for hybrid integrated optics", Symposium on Lasers and Applications, San Jose, California, 7 February 1995, SPIE vol. 2383, pp. 99-109.
  126. M. Daneman, N.C. Tien, O. Solgaard, A.P. Pisano, K.Y. Lau, R.S. Muller, "Linear Microvibromotor for Positioning Optical Elements", Proceedings of the 1995 IEEE Microelectromechanical Systems Conference (MEMS-95), Amsterdam, the Netherlands, pp.55-60, 30 January 1995.
  127. N.C. Tien, M. Daneman, O. Solgaard, K.Y. Lau, R.S. Muller, "Impact-actuated linear microvibromotor for micro- optical systems on silicon", 1994 International Electronic Devices Meeting (IEDM-94), postdeadline paper, 12 December 1994.
  128. O. Solgaard, M. Daneman, N.C. Tien, A. Friedberger, R.S. Muller, K.Y. Lau, "Micromachined alignment mirrors for opto-electronic packaging", Conference on Lasers and Electro- Optics (CLEO), Anaheim, California, Proceedings of postdeadline papers, pp.1-2, 12 May 1994.
  129. J.B. Georges, J. Park, O. Solgaard, D. Cutrer, P. Pepeljugoski, K.Y. Lau, "High Data Rate Millimeter Wave Subcarrier Transmission Using Feedforward Optical Modulation", Optical Fiber Conference (OFC), 23 February 1994.
  130. L.A. Buckman, J.B. Georges, D. Vassilovski, J. Park, O. Solgaard, K.Y. Lau, "Stable Picosecond Pulse Generation at 46 GHz by Passive Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop," Optical Fiber Conference, 23 Feb. 1994.
  131. O. Solgaard, M. Daneman, N.C. Tien, R.S. Muller, K.Y. Lau, "Surface-micromachined active optical bench for optoelectronic integration and packaging", Proceeding of the Microelectronics and Sensor Technology Meeting, Lillehammer, Norway, 17 January 1995 (invited talk).
  132. M.H. Kiang, O. Solgaard, K.Y. Lau "Dynamics of pulse build-up in QW lasers passively modelocked at millimeter wave frequencies", Conference on Lasers and Electro-Optics (CLEO), Baltimore, Maryland, 6 May 1993.
  133. O. Solgaard, J. Park, J.B. Georges, P. Pepeljugoski, K. Y. Lau, "Millimeter wave optical transmission using a tunable laser beatnote source with feedforward compensation", OSA topical meeting on Integrated Photonics Research, Palm Springs, California, 24 March 1993.
  134. F. Sandejas, O. Solgaard, D. M. Bloom, "Deformable grating optical modulator", Conference on Lasers and Electro- Optics (CLEO), Anaheim, California, 14 May 1992.
  135. O. Solgaard, F. Ho, J. I. Thackara, D. M. Bloom, "High Speed Attenuated Internal reflection Modulators", Lasers and Electro-optics 1991 Annual Meeting, San Jose, California, 7 Nov. 1991.
  136. B.R. Hemenway, O. Solgaard, D.M. Bloom, “A small-area light intensity modulator implemented in silicon”, IEEE Transactions on Electron Devices, Nov. 1989; vol.36, no.11, pt.1, p.2614 Journal Abbr.: IEEE Trans. Electron Devices (USA) Conference: 47th Annual Device Research Conference, 19-21 June 1989, Cambridge, MA, USA
  137. B.R. Hemenway, O. Solgaard, R.M. Swanson, D.M. Bloom, "An integrated silicon optical modulator for high speed data communications at 1.3-µm wavelength", Optical Society of America Annual Meeting, Santa Clara, CA, 4 Nov. 1988.
  138. H. Jakobsen, O. Solgaard, “Bulk piezoresistors for stable pressure sensors”, Proceedings of the 12th Nordic Semiconductor Meeting, 8-11 June 1986, Jevnaker, Norway.

Patents

top

  1. H. Sagberg, I-R. Johansen, O. Lovhaugen, O. Solgaard, M. Lacolle, “Configurable diffractive optical element”, United States Patent number 7,286,292, October 23, 2007.
  2. U. Krishnamoorthy, D. Lee, O. Solgaard, K. Yu, “Integrated optical MEMS devices”, United States Patent number 7,238,621, July 3, 2007.
  3. I.-R. Johansen, O. Solgaard, O. Lovhaugen, H. Sagberg, H. Rogne, D. Wang, ” Optical displacement sensor element”, United States Patent number 7,184,368, February 27, 2007.
  4. W. Suh, M.F. Yanik, O. Solgaard, S. Fan, “Photonic Crystal Reflectors/Filters and Displacement Sensing Applications”, United States Patent number 7,155,087 B2, December 26, 2006.
  5. W. Suh, O. Solgaard, S. Fan, “Guided Resonance Dielectric Filter Systems”, United States Patent number 7,142,364 B2, November 28, 2006.
  6. J.-S. Wang, I.-W. Jung; O. Solgaard, “Elastomer spatial light modulators for extreme ultraviolet lithography”, United States Patent number 7,092,138, August 15, 2006.
  7. O. Sahin, C.F. Quate, O. Solgaard, “Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy ”, United States Patent Number 7,089,787, August 15, 2006.
  8. R. Belikov, O. Solgaard, “Diffractive Optical Spectral Filter Having Arbitrary Amplitude and Phase response”, United States Patent number 7,050,235 B2, May 23, 2006.
  9. R. Belikov, O. Solgaard, “Phased array gratings and tunable lasers using same”, United States Patent number 7,042,920, May 9, 2006.
  10. P. Hagelin, O. Solgaard, “Apparatus and method for optical raster-scanning in a micromechanical system”, United States Patent number 6,947,189, September 20, 2005.
  11. O. Sahin, A. Atalar, C.F. Quate, O. Solgaard, “Harmonic cantilevers and imaging methods for atomic force microscopy”, United States Patent Number 6,935,167, August 30, 2005.
  12. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,922,239 B2, July 26, 2005.
  13. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,834,136 B2, December 21, 2004.
  14. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,819,823, November 16, 2004.
  15. K. Yu, O. Solgaard, “Reconfigurable Wavelength Multiplexers and Filters Employing Micromirror Arrays in a Gires-Tournois Interferometer”, United States Patent number 6,804,429, October 12, 2004.
  16. O. Solgaard, U. Krishnamoorthy, “Self-aligned vertical combdrive actuator and method of fabrication”, United States Patent number 6,713,367, March 30, 2004.
  17. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,711,320 B2, March 23, 2004.
  18. K. Li; Kebin, J.P. Heritage, K.T. Cornett, O. Solgaard, U. Krishnamoorthy, “Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics”, United States Patent number 6,643,053, November 4, 2003.
  19. P. Hagelin, O. Solgaard, “Apparatus and method for optical raster-scanning in a micromechanical system”, United States Patent number 6,603,588, August 5, 2003.
  20. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,389,190 B2, May 14, 2002.
  21. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,374,008, April 16, 2002.
  22. P. Hagelin, O. Solgaard, “Apparatus and method for optical raster-scanning in a micromechanical system”, United States Patent number 6,347,002, February 12, 2002.
  23. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,327,398, December 4, 2001.
  24. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,289,145, 1 September 11th, 2001.
  25. P. Hagelin, O. Solgaard, "Apparatus and method for optical raster-scanning in a microelectromechanical system”, United States Patent Number 6,246,504, June 12, 2001.
  26. O. Solgaard, J.P. Heritage, A.R. Bhattarai, “Multi-Wavelength Cross-connect Optical Switch”, United States Patent Number 6,097,859, 1 August 2000.
  27. M-H. Kiang, K.Y. Lau, R.S. Muller, O. Solgaard, "Apparatus and method for optical scanning with an oscillatory microelectromechanical system”, U.S. Patent Number 5,867,297, 2 February 1999.
  28. D.M. Bloom, F.S.A. Sandejas, O. Solgaard, "Method and apparatus for modulating a light beam", United States Patent Number: 5,808,797, September 1998.
  29. D.M. Bloom, F.S.A. Sandejas, O. Solgaard, R. Apte, "Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate", United States Patent Number: 5,677,783, October 1997.
  30. D.M. Bloom, F.S.A. Sandejas, O. Solgaard, R. Apte, "Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate", United States Patent Number: 5,459,610, September 1995.
  31. D.M. Bloom, F.S.A. Sandejas, O. Solgaard, "Method and apparatus for modulating a light beam", United States Patent Number: 5,311,360, 10 May 1994.
  32. O. Solgaard, J.I. Thackara, "Electro-optic attenuated total internal reflection modulator and method", United States Patent Number: 5,155,617, 13 October 1992.

Book Chapters

top

  1. C. Quate, O. Sahin, O. Solgaard, F.J. Giessibl, “Higher-Harmoonic Force Detection in Dynamic Force Microscopy”, Chapter 26 of ‘Handbook of Nanotechnology” 2nd edition, pp. 717-736, edited by B. Bhushan, Springer Verlag, 2006.
  2. U. Krishnamoorthy, O. Solgaard, "Vertical Combdrives - Design and Implementation",MEMS/NEMS Handbook. Editor: Dr. Cornelius Leondes, Volume 5, Chapter 9, Pages 393-420, Springer-Verlag New York Inc., September 2005